The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 1989
Filed:
Jul. 06, 1987
Applicant:
Inventor:
George T Harvey, Princeton, NJ (US);
Assignee:
American Telephone and Telegraph Company, , NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F / ;
U.S. Cl.
CPC ...
430 22 ; 430311 ; 430394 ; 250548 ; 356400 ;
Abstract
Photomasks (11,12) are aligned on opposite sides of a wafer by directing light beams through zone plates (13 A-C) in one photomask and through aligned transparent slits (14 A-C) on the other photomask. Simultaneous detection of the beams by photodetectors (18 A-C) indicates alignment. A method for obtaining precise centering by scanning the slits with the beams, sampling light transmitted through the slits, and fitting the samples to a parabola by the use of a computer (27) is also described.