The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 1989
Filed:
Oct. 14, 1987
Jean Le Bris, Quincy Sous Senart, FR;
Marko Erman, Paris, FR;
U.S. Philips Corporation, New York, NY (US);
Abstract
A spectroscopic ellipsometer comprises an illumination device having a focal point (F'.sub.2) for illuminating a surface of a sample (E) in accordance with a given angle of incidence and a device for analyzing the light reflected from the surface of the sample. The sample support comprises three translation plates (20,30,40) in accordance with three respective directions (T.sub.2, T.sub.3, T.sub.1). The translations in accordance with the first (T.sub.1) and second (T.sub.2) directions make it possible to realise cartographic representations of the sample (E) and the translation in accordance with the third direction (T.sub.3) makes it possible to cause a point on the surface of the same (E) to coincide with the focal point (F'.sub.2). Two plates (PT.sub.2, 12) rotating about the axes O.sub.1 and O.sub.2, respectively, parallel to the first (T.sub.1) and second (T.sub.2) directions and intersecting each other at the focal point (F'.sub.2) provide the possibility of orienting the sample (E) by means of rotation in two orthogonal planes about the focal point (F'.sub. 2).