The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 30, 1989
Filed:
Apr. 17, 1987
Tokyo Kogaku Kikai Kabushiki Kaisha, Tokyo, JP;
Abstract
A shape measuring apparatus is disclosed. It comprises a pattern portion having a pattern in which pattern elements are arranged in the pitch width direction according to a predetermined rule so that a plurality of N codes can be distinguished with respect to one another; a projecting portion having a moving portion for moving the pattern in the pitch width direction according to a rule and projection optical system for projecting the pattern onto an object to be measured; a detecting portion for detecting a first detection data and a second detection data by measuring a surface information of the object to be measured on which the pattern is projected from two different directions every time the pattern is moved by the moving portion; an extracting portion for extracting a first position data and a second position data corresponding to a point position of the object to be measured from the first and second detection data respectively; and a calculating portion for calculating a coordinate of the point position corresponding to the first position data of the object to be measured from the first position data and the second position data.