The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 1989
Filed:
Apr. 26, 1988
Applicant:
Inventors:
Wayne G Fisher, Allen, TX (US);
Tommy J Bennett, McKinney, TX (US);
Cecil J Davis, Greenville, TX (US);
Robert T Matthews, Plano, TX (US);
Assignee:
Texas Instruments Incorporated, Dallas, TX (US);
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; B05D / ; C03C / ;
U.S. Cl.
CPC ...
156345 ; 156654 ;
Abstract
A rapid thermal processing apparatus and method wherein a transparent (e.g. quartz) vacuum wall is sealed to the process chamber by a radially elastically expandable metallic seal, e.g. a hollow metallic ring with a spring in its core, which has a soft surface portion which deforms inelastically to make a seal.
Fisher, Wayne. (1989). Processing apparatus (U.S. Patent No. 4832779). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4832779
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile