The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 1989
Filed:
Sep. 08, 1987
Arthur E Geissberger, Roanoke, VA (US);
Philippe R Claytor, Roanoke, VA (US);
ITT Gallium Arsenide Technology Center, A Division of ITT Corporation, Roanoke, VA (US);
Abstract
A process for manufacturing gallium arsenide microwave circuits makes use of a nonphotosensitive acid resist as an adhesive for holding the 'front side' of a gallium arsenide wafer onto a substrate while operations such as etching 'via holes' into the wafer are being performed on the 'back side' of the wafer. The process comprises front side processing, spinning the nonphotosensitive acid resist onto the frontside of the GaAs wafer, baking the protective acid resist coating onto the wafer, spinning the acid resist onto a substrate, joining the wafer to the substrate, thinning the wafer, and performing backside processing.