The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 23, 1989
Filed:
Jan. 27, 1988
Humio Naruse, Yokohama, JP;
Nihon Shinku Gijutsu Kabushiki Kaisha, Chigasaki, JP;
Abstract
The present invention relates to a fine particle collector arrangement for vacuum pumps, in which high temperature walls and low temperature walls are alternately provided in the collecting chamber to form gas flow passage which is extended from the inlet conduit connected with the vacuum processing chamber to the outlet conduit connected with the vacuum pump, and the gas flow passage has larger cross section than that of the inlet conduit. Fine particles in gas flowing from the inlet conduit are deposited on the each low temperature wall member to be efficiently collected by the thermal creep velocity caused by the thermophoretic force.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile