The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 23, 1989

Filed:

Mar. 19, 1986
Applicant:
Inventors:

James C Wyant, Tucson, AZ (US);

Katherine Creath, Tucson, AZ (US);

Assignee:

Wyko Corporation, Tucson, AZ (US);

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356359 ; 356360 ;
Abstract

An improved apparatus and method are described for accurately 'reconstructing' steep surface profiles, such as for aspheric surfaces, using improved two-wavelength phase-shifting interferometry, wherein single-wavelength precision is obtained over surfaces having departures of hundreds of visible wavelengths from a reference surface. The disclosed technique avoids cumulative summing of detector errors over a large detector array by computing the 'equivalent' phase for each detector independently of the intensities of other detectors. Inaccurate phase data points having an equivalent fringe contrast less than a predetermined threshold are eliminated from data from which contour maps of the aspheric surface are displayed or plotted.


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