The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 1989
Filed:
Sep. 25, 1987
Applicant:
Inventors:
Morikazu Konishi, Kanagawa, JP;
Masaaki Takizawa, Kanagawa, JP;
Assignee:
Sony Corporation, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ; H01J / ;
U.S. Cl.
CPC ...
3133621 ; 3133631 ;
Abstract
An ion beam apparatus with an ion gun in which a gas to be ionized is supplied to the periphery of an emitter and a high voltage is applied between the emitter and an extractor so that the gas introduced to the vicinity of the emitter tip is ionized to generate an ion beam. The structure of the ion gun is formed so as to achieve a high ion current density of the ion beam as well as to prevent short-circuiting that may otherwise be caused by atmospheric electric discharge between the emitter and the extractor.