The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 16, 1989
Filed:
Jun. 22, 1988
Applicant:
Inventors:
John Galvagni, Myrtle Beach, SC (US);
Robert A Miller, Walden, NY (US);
Assignees:
AVX Corporation, Great Neck, NY (US);
IBM Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ; C23C / ;
U.S. Cl.
CPC ...
20419217 ; 20419215 ; 204298 ; 427282 ; 118505 ;
Abstract
A method of forming successive metal layers of varying widths on a substrate is disclosed. A mask having a through going aperture is provided, the mask including a constricted neck portion between its upper and lower surfaces. Successive metal layers are applied over the substrate through the aperture in the mask sequentially by sputtering methods which form a metallic layer wider than the constricted neck portion of the mask and by vapor deposition method which forms a narrower metal layer corresponding to the transverse dimension of the constricted portion of the mask.