The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 1989
Filed:
Mar. 16, 1987
Applicant:
Inventors:
Bruce E Engles, Austin, TX (US);
Gianfranco Gerosa, Austin, TX (US);
Assignee:
Motorola, Inc., Schaumburg, IL (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ; G11C / ; G11C / ;
U.S. Cl.
CPC ...
357 235 ; 357 59 ; 365185 ; 365 51 ;
Abstract
An integrated circuit floating gate memory is formed using two layers of polysilicon. The first layer of polysilicon is patterned twice, once before the second polysilicon layer is deposited, and again as part of the etch of the second layer of polysilicon. Stringers of the second layer of polysilicon can form along the edge of the first etch of the first layer of polysilicon. The first etch of the first layer of polysilicon is patterned so that even if these stringers are subsequently formed, there is no harm.