The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 1989
Filed:
Aug. 28, 1987
Allen R Waugh, East Grinstead, GB;
VG Instruments Group Limited, Crawley, GB;
Abstract
An apparatus adapted for the analysis of a surface of a sample and comprising: means for stimulating a region of said surface to emit charged particles; means for moving a light reflecting means in a substantially rectilinear fashion along an optical axis of a microscope to a position where it reflects an image of said region to said microscope; and means for moving an extraction electrode in a substantially rectilinear fashion in a direction substantially parallel to, or coincident with, said optical axis to a position where said charged particles pass through an aperture in said extraction electrode to a charged particle analyzer. The invention allows both the direction of extraction of charged particles, and the direction along which said surface is viewed, to be coincident and perpendicular to said surface.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile