The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 1989
Filed:
Sep. 02, 1988
Jeffrey L Klein, Austin, TX (US);
Stephen S Poon, Austin, TX (US);
Mark S Swenson, Austin, TX (US);
Sudhir K Madan, Austin, TX (US);
Motorola, Inc., Schaumburg, IL (US);
Abstract
A semiconductor process is provided for the formation of a very low resistance contact. After a straight wall contact is formed conventionally above a silicon substrate, a blanket metal barrier layer is deposited. A plurality of planar polysilicon layers are deposited above the metal barrier layer. The polysilicon layers have varying doping levels and are etched away. A byproduct gas of the etch reaction is monitored and the transition between polysilicon layers can be accurately noted. In this way, a layer of doped polysilicon is left above the metal barrier in the contact region. Metal may then be patterned over the entire structure to provide a low resistance reliable contact.