The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 09, 1989
Filed:
May. 24, 1988
Mitsui Petrochemical Industries, Ltd., Tokyo, JP;
Abstract
The invention concerns a method of producing protective films or the like used as protective covers for photomasks or reticles. To peel a thin film off a substrate, a peeling jig constituted by a flexible annular frame with an adhesive applied thereon is pressed against the thin film applied on the substrate; a portion of the peeling jig is grabbed after the peeling jig and the thin film are adhered together; and the peeling jig and the film are peeled off the substrate. Before adhering the peeled film onto a side end surface of a pericle frame, of the two edges of the pericle frame, at least the edge formed by an inside surface thereof and the side end surface thereof is chambered.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile