The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 1989
Filed:
Oct. 26, 1987
Robert Zwirn, Los Angeles, CA (US);
Hughes Aircraft Company, Los Angeles, CA (US);
Abstract
An inspection system incorporating a subresolution element spatial measurement technique is disclosed. The system of the invention includes a scanner for scanning, with a beam of electromagnetic energy, an object area having first and second contiguous sections of first and second degrees of reflectivity or transmissivity with respect to the beam. A detector assembly is disposed to receive energy reflected from or transmitted through the object area and to provide a first signal having a first measured value S representing the amplitude of energy instantaneously reflected from or transmitted through the object area. Processing apparatus is included for analyzing the first signal and computing the ratio F of one of the first or second sections as a fraction of the total area instantaneously illuminated by the beam.