The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 1989
Filed:
Jun. 11, 1987
William C Breneman, Sistersville, WV (US);
Robert N Flagella, Ridgefield, WA (US);
Jon M Gaston, Montreal, CA;
David W Hagan, Vancouver, WA (US);
Union Carbide Corporation, Danbury, CT (US);
Abstract
The present invention is directed to an improved process for producing ultra high purity polycrystalline silicon which process provides for increased production capacity and electrical power efficiency. The process comprises recycling the exhaust gases of the silane pyrolysis reactor after the gases have been preferably first cooled and filtered utilizing a pocket-type reaction zone enclosure having a particular effective radius thereby effectively decreasing the amount of silicon powder formation. Preferably, the rate of recycle flow is sufficient to entrain silicon powder in the reactor and remove the powder from the reactor with the exiting exhaust gases.