The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 02, 1989
Filed:
Oct. 21, 1987
Applicant:
Inventors:
Assignee:
Sumitomo Electric Industries, Ltd., Osaka, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G01L / ;
U.S. Cl.
CPC ...
73 / ;
Abstract
A method of measuring a semiconductor pressure sensor comprises the steps of mounting a wafer formed with diaphragm type semiconductor pressure sensors on a wafer stage, evacuating air existing between the back surface side of said diaphragm type semiconductor pressure sensors and said wafer stage through at least one hole provided in said wafer stage to deform diaphragms of said semiconductor pressure sensors, and measuring the pressure sensitivity of each of said semiconductor pressure sensors from the surface side of said semiconductor pressure sensors.