The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 1989
Filed:
Dec. 22, 1987
Applicant:
Inventors:
Assignee:
Etat Francais (Centre National d'Etudes des Telecommunication), Issy-les-Moulineaux, FR;
Primary Examiner:
Int. Cl.
CPC ...
B23K / ;
U.S. Cl.
CPC ...
21912172 ; 21912174 ; 21912175 ; 21912183 ;
Abstract
A microbeam laser machine for operating on objects having thin layers comprises a platen (14) which is rigid and undeformable and which has optical components mounted thereon defining a laser beam transmission path (34, 36, 38, 46), an illumination path (54, 55, 46), and an observation path (70, 74, 76). The invention is intended, in particular, for microoperations on integrated circuits and other objects having thin layers.