The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 1989
Filed:
Sep. 09, 1987
Applicant:
Inventors:
Assignee:
Mitsubishi Denki Kabushiki Kaisha, Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437187 ; 437203 ; 357 71 ; 357 52 ;
Abstract
A polysilicon film is provided in a first region provided with a bonding pad on a silicon substrate and a second region apart from the first region and surrounding the first region, an aluminum film serving as a bonding pad is provided on the polysilicon film in the first region, a PSG (Phospho-Silicate Glass) film is provided on the polysilicon film in the second region, and an insulating protective film including no phosphorus is provided between the aluminum film and the PSG film.