The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Apr. 25, 1989

Filed:

Mar. 14, 1988
Applicant:
Inventors:

Akira Tabata, Zama, JP;

Motoshu Miyajima, Kawasaki, JP;

Kazushi Kawaguchi, Yokohama, JP;

Assignee:

Fujitsu Limited, Kanagawa, JP;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 33 ; 437 31 ; 437 89 ; 437 92 ; 437191 ; 437238 ; 437241 ; 148D / ; 148D / ; 148D / ;
Abstract

A bipolar transistor having self-aligned base and emitter regions is fabricated in a silicon layer which is epitaxially grown on a substrate so as to fill up a cavity formed through a polysilicon layer deposited on the substrate. The polysilicon layer is doped with impurities for creating an extrinsic base region in the epitaxially grown silicon layer and is insulated from the emitter electrode by a dielectric layer formed thereon. The dielectric layer can be provided by selectively oxidizing the polysilicon layer. Thus, the step formed at the emitter electrode is small and equal to the thickness of the dielectric layer, about 3000 .ANG., for example, thereby eliminating the faulty step coverage in the prior art self-aligned bipolar transistor usually having the step as large as 1 micron.


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