The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 25, 1989
Filed:
May. 18, 1984
Applicant:
Inventors:
Hiroshi Ohtsuka, Tokyo, JP;
Yoshio Itoh, Tokyo, JP;
Tadashi Nishimuro, Tokyo, JP;
Hisamitsu Mitsutomi, Miyazaki, JP;
Assignee:
Oki Electric Industry Co., Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01B / ;
U.S. Cl.
CPC ...
356401 ;
Abstract
Alignment marks on a semiconductor wafer comprise a first alignment island projecting from a surface of the wafer and a second alignment island having substantially the same height as the first alignment island and surrounding the same with a slit therebetween. The slit is utilized as a pattern for aligning with an alignment mark on a photomask. Preferably the alignment marks are formed on the grid line region of the wafer.