The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Apr. 18, 1989
Filed:
Dec. 15, 1987
Applicant:
Inventors:
Assignee:
Lumonics Inc., Kanata, CA;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01S / ;
U.S. Cl.
CPC ...
372 57 ; 372 11 ; 372 20 ; 372 32 ;
Abstract
In an excimer laser system with wavelength bandwidth narrowing, a feedback loop for monitoring and correcting the tuning of the laser employs a wavelength calibration device in the form of a gas with an absorption peak at the desired narrow wavelength. A portion of the laser output received through the gas provides the information for generating the correction signal.