The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Mar. 28, 1989

Filed:

Mar. 28, 1988
Applicant:
Inventors:

Albert Feuerstein, Neuberg, DE;

Helmut Eberhardt, Grundau, DE;

Helmut Lammermann, Alzenau, DE;

Volker Bauer, Neuberg, DE;

Gerard Lobig, Frankfurt am Main, DE;

Assignee:

Leybold-Heraeus GmbH, Cologne, DE;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118718 ; 118 501 ; 118620 ; 118720 ; 118722 ; 118730 ;
Abstract

An apparatus for producing and coiling films of insulating material coated under a vacuum with electrically conductive material, comprising an electron beam vaporizer, a feed drum, a roller disposed above the electron beam vaporizer and looped by the film, a take-up drum, and deflector rolls for establishing a path for the film, at least one plasma source oriented towards the path of the film so that the plasma touches the film, said plasma source being disposed in the region of the path of the film from the electron beam vaporizer to the take-up drum, wherein the plasma source is disposed at the end of the angle of contact specified by one of the deflector rolls.


Find Patent Forward Citations

Loading…