The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 1989
Filed:
Sep. 25, 1987
Giampiero Ferraris, Monza, IT;
Antonio Tersalvi, Milan, IT;
GTE Telecomunicazioni, S.p.A., Cassina de Pecchi, IT;
Abstract
It is described a process to obtain thin film lines by photolithography of thick resist and subsequent selective galvanic growth of gold which enables to obtain very thin lines (2-10 micron) with high definition, that is with nearly vertical walls and with a tolerance in the width of about 1 micron. Such results have been achieved by using polyimide as thick resist, by particular cure cycles of the same polyimide and by a particular dry etching of the polyimide layer to obtain seats in which afterwards the lines become grown.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile