The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 14, 1989
Filed:
Dec. 21, 1987
Applicant:
Inventor:
Edward N Sickafus, Grosse Ile, MI (US);
Assignee:
Ford Motor Company, Dearborn, MI (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
156626 ; 156647 ; 1566591 ; 156662 ; 7386264 ; 29 2541 ;
Abstract
A suspended element etched in a silicon substrate whcih is deflected in linear proportion to an applied force. A pair of flexing member symmetrically positioned around the suspended element provides rectilinear movement of the suspended element in response to the applied force. In one embodiment of the invention, the flexing member is formed in a single etchant step by concurrently etching nearly identical recesses into opposing planar surfaces of the silicon substrate. In this embodiment, the portions of silicon remaining between the recesses and planar surfaces define the flexing member.