The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Mar. 07, 1989
Filed:
Dec. 23, 1987
Ryohei Yabe, Katsuta, JP;
Hajime Matsushita, Katsuta, JP;
Hitachi, Ltd., Tokyo, JP;
Abstract
An automatic focusing control method for microscope includes preliminarily determining and storing respective in-focus positions of an objective lens of the microscope for a plurality of points on a stage of the microscope prior to observation and measurement of a sample by the microscope. Upon actual measurement after the sample has been mounted on the microscope stage, an approximate in-focus position of the objective lens for the sample is determined on the basis of the stored in-focus positions of the objective lens for at least one of the plurality of points in the vicinity of the sample. Then, the objective lens is moved to the determined approximate in-focus position at a high speed, and a usual automatic focusing is thereafter carried out, thereby making it possible to perform the automatic focusing operation rapidly and accurately.