The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 21, 1989
Filed:
Jan. 15, 1988
Applicant:
Inventors:
David W Hagan, Circleville, OH (US);
William D Burke, Vancouver, WA (US);
Thomas R Thoman, Moses Lake, WA (US);
McRea B Willmert, Moses Lake, WA (US);
Assignee:
Union Carbide Corporation, Danbury, CT (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118725 ; 118715 ; 118719 ; 422245 ;
Abstract
This invention relates to the manufacture of high-purity polycrystalline silicon rods by the pyrolysis of silane. More specifically, the present invention relates to an improved method for pyrolyzing monosilane to form high-quality polycrystalline rods of uniform diameter and to an improved pyrolysis reactor system for forming high-quality polycrystalline silicon rods of uniform diameter at high production rates.