The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1989
Filed:
Jan. 27, 1987
Hans-Detlef Brust, Dudweiler, DE;
Siemens Aktiengesellschaft, Berlin and Munich, DE;
Abstract
A method and arrangement for imaging surface structures and distributions of voltages of a specimen using a scanning microscope that includes a detector system for detecting secondary electrons triggered at the specimen to be investigated. The detector system used includes a plurality of individual detectors arranged symmetrically relative to the specimen so that the secondary particles can be extracted largely symmetrically and independent of the emission point and emission angle. To detect secondary particles emitted in the direction of the symmetry axis of the detector system, an extraction field is generated with time dependent signals so that the secondary particles are accelerated in a momentarily highly asymmetrical field which is symmetrical on a chronological average, the secondary particles being deflected in a direction of regions sensitive to the secondary particles.