The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1989
Filed:
Mar. 26, 1987
Applicant:
Inventor:
Sadao Takahashi, Katsuta, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250288 ; 250304 ;
Abstract
A mass spectrometer includes apparatus for irradiating a target with a primary beam, apparatus for forwarding the target from the outside of a vacuum chamber, apparatus for analyzing the mass of secondary ions emitted by the target, and apparatus for collecting data on the secondary ions thus mass-analyzed. Further, apparatus is provided for synchronizing the timing for the forwarding of the target and that for the data collection and for stopping substantially the data collection during a predetermined period of time (T) after the stopping of the forwarding of the target.