The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Feb. 07, 1989
Filed:
Jan. 29, 1988
Howard A Hendrix, Morgan Hill, CA (US);
Howard W Schmidt, Jr, Gilroy, CA (US);
Ernest S Ward, San Jose, CA (US);
International Business Machines Corporation, Armonk, NY (US);
Abstract
A sputtering apparatus for coating a substrate comprising a first electrode for supporting a suitable target material and a second electrode for supporting a substrate, upon which a coating is deposited. A source of RF power is connected to impose an RF voltage across the electrodes to produce a glow discharge in the space between the electrodes. A shield is provided surrounding the peripheral edges and the back of the second electrode, and this shield is spaced a substantial distance from the back of the electrode. Electrical insulating material is placed in the space between the shield and the back of the second electrode with a small gap between the electrical insulating material and the shield. The configuration of the shield, the insulating material, and the second electrode eliminates spurious sputtering from the peripheral and back regions of the second electrode so that very high power levels can be achieved and sputtering can be done very efficiently at high sputtering rates.