The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 24, 1989

Filed:

Jan. 07, 1988
Applicant:
Inventor:

Bradway F Phillips, Bloomington, MN (US);

Assignee:

Other;

Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
250288 ; 250309 ; 250396 ;
Abstract

Secondary ion mass spectrometer system having an ion collection lens including three conical lens sections, aligned along an axis, deflection plates for dynamically deflecting an ion beam along this axis, wherein the combination of lens sections and deflection plates focus the ions at an entrance aperture of an ion energy spectrometer formed by two 90.degree. sectors of spherical arcuate plates, an ion deceleration lens, a quadrupole mass spectrometer, and an ion detector. In combination, the three conical lens sections accelerate ions from a specimen surface, decelerate these ions into an ion energy spectrometer for energy window matching to the quadrupole mass spectrometer, and focus the ions on the entrance aperture of the ion energy spectrometer.


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