The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jan. 17, 1989

Filed:

Mar. 31, 1983
Applicant:
Inventors:

Tetsuo Tada, Hyogo, JP;

Keisuke Okada, Hyogo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R / ; G01R / ;
U.S. Cl.
CPC ...
3241 / ; 324 725 ; 3241 / ;
Abstract

A wafer testing device in which a plurality of wafers can be tested simultaneously significantly reducing the time required for testing each chip. A prober is provided which receives a wafer to be tested. A probe card is coupled to the prober having a window through which a plurality of semiconductor memory chips on the wafer are observable. A plurality of probes are coupled to the periphery of the window in such a manner that the probes can be brought into contact with bonding pads on the plurality of semiconductor memory chips. A tester is connected to the probes which is capable of simultaneously testing each of the plurality of chips.


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