The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jan. 17, 1989
Filed:
Jan. 02, 1987
Applicant:
Inventor:
Alvin M Marks, Athol, MA (US);
Assignee:
Other;
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J / ;
U.S. Cl.
CPC ...
2504922 ; 250398 ;
Abstract
A demagnified image of an array of electron emitters is focused by an electron optics lens onto a substrate. The image of the array is scanned to draw a number of patterns, corresponding to the number of emitters, on the substrate. The image is also moved in a step - and - repeat manner to draw patterns over a larger portion of the substrate than can be covered by one emitter array image.