Dial deposition and processing apparatus

Abstract

A system for moving and processing workpieces includes individual stations isolated from one another and from a main chamber by seals formed by a transport mechanism. Workpieces are moved in a queue in a circular pattern, by a dial turret operated by a bell-crank and a Geneva mechanism. Stations seal to the baseplate from below, and a vacuum chamber encloses the turret assembly which operates on a post through a center hole in the baseplate. Workpieces loaded to one depended chamber are withdrawn from chambers and inserted into next chambers in a circular pattern, passing through the main chamber with each transfer, and ending back in the chamber where they were loaded. In an alternative embodiment passages between the main chamber and each individual chamber have valves allowing processing to take place without carriers attached to the turret being in the processing chambers. In another embodiment a single radial arm transfers one workpiece at a time, indexing in either direction, allowing workpieces withdrawn from one chamber to be placed in any other chamber. In other alternative embodiments automatic equipment for loading and unloading workpieces is provided with a single cassette air-lock and with in-line air locking for cassettes. Provision is made for a wide variety of processes to be performed, and processing can be from one or both sides of a workpiece.