The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 1988
Filed:
Sep. 23, 1987
Applicant:
Inventors:
Richard R Phinney, South Hero, VT (US);
David C Strippe, Waterbury Center, VT (US);
Assignee:
International Business Machines Corporation, Armonk, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H05B / ;
U.S. Cl.
CPC ...
219 10491 ; 219 1067 ; 118726 ; 118620 ; 373156 ;
Abstract
An evaporation source for RF heated evaporators in which the crucible has a susceptor made of a solid block of graphite carbon having a volume commensurate with the volume of molten material prior to evaporation. Moreover, the crucible has a depth that is less than twice its diameter. These features enhance the self-fractionation of the molten material prior to evaporation to thus enhance the properties of the film as-deposited.