The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 1988
Filed:
Oct. 13, 1987
U.S. Philips Corporation, New York, NY (US);
Abstract
The invention relates to an optical sample illumination device for a spectroscopic ellipsometer of the rotating analyzer type. The image of the exit slit (F') of a monochromator is conjugated with a point (F'.sub.2) of a surface of a sample (E) by means of two spherical mirrors (M.sub.7 and M.sub.8). An astigmatism correction slit (F'.sub.15) is arranged in the proximity of the conjugate (F'.sub.1) of the exit slit(F') of the monochromator with respect to the spherical mirror (M.sub.7) and is arranged perpendicularly to this exit slit and to the optical path so that said correction slit is conjugated with the said point (F'.sub.2) through the spherical mirror (M.sub.8). A luminous spot without astigmatic errors is thus obtained.