The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 1988
Filed:
Dec. 01, 1986
Applicant:
Inventors:
John H Bruning, Pittsford, NY (US);
Graham J Siddell, Rochester, NY (US);
Assignee:
GCA Corporation/Tropel Division, Fairport, NY (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G02B / ; G02B / ; G01B / ; G01R / ;
U.S. Cl.
CPC ...
350574 ; 350521 ; 324 / ; 356358 ; 356401 ;
Abstract
Metrology for a microlithographic objective reducing lens 10 is integrated into a metrology block 20 secured to a lower region of the barrel 15 for lens 10. Block 20 has a central opening 27 around a lowermost element 11 of lens 10; and block 20 mounts distance detectors 28 around central opening 27, a pair of microscope objectives 30 and 31, and a pair of X and Y mirrors 40 and 41.