The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 1988
Filed:
Sep. 24, 1987
Thomas A Knecht, Chanhassen, MN (US);
Mark G Romo, Eden Prairie, MN (US);
Rosemount Inc., Eden Prairie, MN (US);
Abstract
A pressure sensor that provides for multiple diaphragm sensing regions in a side by side configuration which can be formed into a stacked monolithic batch fabricated form. The multiple pressure sensor can be constructed to sense differential or absolute pressure as desired. In preferred forms of the invention, the pressure inlets are all on the same side of the monolithic structure to easily isolate the corrosive pressure media from the sensing means, which as shown comprise strain gage sensors on the sensing diaphragms as well as from the conductors carrying signals from the sensing means. The variable strain gage resistors on the sensor diaphragms are segregated from the media in several differet ways using isolating layers. The stacked sensor configuration insures that the device can be batched fabricated so that a number of sensors can be formed on chips that are stacked and bonded together, and then separated into individual sensors.