The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Dec. 13, 1988
Filed:
Aug. 23, 1985
Harry E Aine, Los Altos, CA (US);
Other;
Abstract
A thermal mass flow meter includes a comb-shaped structure having a plurality closely spaced septa carried from a common spine and disposed within the flow stream to be measured for partitioning the flow therein into a plurality of generally parallel elongated ribbon-shaped flow stream portions. Temperature-dependent fluid flow sensing resistor means is coupled in heat-exchanging relation predominantly with the narrow face of at least one of said ribbon-shaped flow stream portions for measuring the fluid flow. In a preferred embodiment, the comb-shaped flow partitioning structure is fabricated by anisotropically etching the parallel flow channels through the (110) face of diamond cubic material such as silicon. In another embodiment, a thermal loading member is disposed in heat-exchanging relation with the temperature dependent fluid flow sensing resistor means for thermally loading same and pushing the critical flow rate up to a higher flow to allow operation of the flow sensor in one mode of operation over a wider range of flow rates.