The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 29, 1988
Filed:
Mar. 02, 1987
Applicant:
Inventors:
Yukishige Kamino, Tsuchiura, JP;
Nobuyuki Hiraishi, Katsuta, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C / ;
U.S. Cl.
CPC ...
118726 ;
Abstract
A metal vapor generator of the present invention is constituted to locate an airtight joint between a body with an opening around its top and a bottom plate, in the vicinity of the lower portion of the body. According to such an arrangement, since said airtight joint locates at a side where a powder metal depositing material such as copper, aluminum or the like is filled up within the vessel and whose particle size of the depositing metal material is large, penetration of the particles into the airtight joint is reduced, thereby facilitating the detachment between the bottom plate and the body.