The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 1988
Filed:
Jan. 22, 1987
Applicant:
Inventors:
Krishna Shankar, Mountain View, CA (US);
Ram Ramani, San Jose, CA (US);
Assignee:
Advanced Micro Devices, Inc., Sunnyvale, CA (US);
Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
357 71 ; 357 65 ; 357 67 ; 357 68 ;
Abstract
Construction of a novel multilayer conductive interconnection for an integrated circuit having more than one conductive layer is disclosed comprising a lower barrier layer which may be in contact with an underlying silicon substrate and comprising a material selected from the class consisting of TiW and TiN; an intermediate layer of conductive metal such as an aluminum base metal; and an upper barrier layer which may be in contact with a second aluminum base metal layer and which is selected from the class consisting of TiW, TiN, MoSi.sub.x and TaSi where x equals 2 or more.