The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Nov. 01, 1988
Filed:
Jul. 21, 1987
Applicant:
Inventor:
Adriaan F Leenaars, Eindhoven, NL;
Assignee:
U.S. Philips Corporation, New York, NY (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B / ;
U.S. Cl.
CPC ...
134 34 ; 134 35 ; 134 42 ;
Abstract
A method of removing articles having a diameter which is smaller than 0.3 .mu.m from a surface of a substrate, the method comprising moving an interface of the liquid over the surface of the substrate at a speed of up to 10 cm/sec. This is of great importance in the manufacture of integrated circuits with submicron details, in which contamination with such particles may have destructive consequences for the satisfactory operation of the circuit.
Quick Actions:
Leenaars, Adriaan. (1988). Method of removing undesired particles from a surface of a substrate (U.S. Patent No. 4781764). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/4781764
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile