The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 18, 1988
Filed:
Feb. 05, 1987
Yoshihito Koshiba, Kyoto, JP;
Omron Tateisi Electronics Co., Kyoto, JP;
Abstract
An apparatus for locking a movable stage onto a stationary base, the stage being moved in the state floating above the base. The apparatus comprises a cap-like vacuum suction plate fixedly combined with the stage and defining a space in cooperation with the stationary base, wherein the space is selectively connected either to an air supply source or to a vacuum source. To move the stage in the floating stage, the space defined below the vacuum suction plate is connected to the air supply source to thereby form an air bearing between the vacuum suction plate and the base plate, whereby a gap and parallelism is maintained therebetween. Upon completion of positioning of the stage, the space is connected to the vacuum source so that the vacuum suction plate is locked onto the stationary base under the suction effect brought about by evacuation of the space.