The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 11, 1988

Filed:

Sep. 17, 1986
Applicant:
Inventors:

Kurt Mayr, Wangle, AT;

Reinhard Staffler, Ehenbichl, AT;

Werner Tippelt, Linz, AT;

Walter Scharizer, Gallneukirchen, AT;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B05D / ; B05D / ; C23C / ;
U.S. Cl.
CPC ...
427 34 ; 427 96 ; 427 99 ; 427123 ; 4271261 ; 4271263 ; 4271264 ; 427249 ; 4272552 ; 4272553 ; 427405 ; 427409 ; 4274192 ; 4274197 ; 437235 ; 437238 ; 437241 ; 437245 ;
Abstract

A method is provided for making a composite substrate for electronic semiconductor parts. The composite substrate has a metal core, an insulating layer, and a conducting layer. The insulating layer is deposited by chemical vapor deposition in the gaseous phase on the metal core, or by chemical vapor deposition in combination with other techniques, such as plasmaspraying and/or melting. The metal core is comprised of a highly heat-resistant refractory metal, e.g., molybdenum, tungsten, titanium, molybdenum-manganese alloy, or a high-alloy steel having a permeability of about 1.002. The insulating layer is comprised of an inorganic material such as aluminum oxide or aluminum nitride. The conducting layer typically comprises copper.


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