The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 11, 1988
Filed:
Aug. 22, 1986
Applicant:
Inventors:
Hartmut Steppan, Wiesbaden, DE;
Ulrich Geissler, Hochheim, DE;
Assignee:
Hoechst Aktiengesellschaft, , DE;
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
B08B / ; B08B / ; C03C / ; G03C / ;
U.S. Cl.
CPC ...
134 38 ; 134-2 ; 134 29 ; 430329 ; 430331 ; 252547 ; 252156 ; 252D / ;
Abstract
Light-hardened photoresist layers are stripped by treating the layer with an aqueous solution of an organic quaternary ammonium base and, optionally a strong inorganic base. The resulting layer residues are dispersed as relatively small flakes which do not become lodged between conducting paths.