The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Oct. 04, 1988
Filed:
Jun. 03, 1987
Applicant:
Inventor:
Roger T Szeto, San Jose, CA (US);
Assignee:
LSI Logic Corporation, Milpitas, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
H01L / ; H01L / ;
U.S. Cl.
CPC ...
437 69 ; 437 73 ;
Abstract
The present method provides for formation of isolation oxide without 'bird-beak' extensions thereof through the use of a nitride mask in contact with the surface of a semiconductor substrate on both sides of a patterned oxide layer, on which substrate the isolation oxide is grown.