The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Oct. 04, 1988

Filed:

Feb. 02, 1987
Applicant:
Inventors:

Kuang-Yeh Chang, Austin, TX (US);

Charles F Hart, Pflugerville, TX (US);

Yee-Chaung See, Austin, TX (US);

Assignee:

Motorola, Inc., Schaumburg, IL (US);

Attorneys:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
437 44 ; 437 52 ; 437 57 ; 437 43 ; 357 42 ;
Abstract

Implementing modified souce/drain implants in a non-volatile memory process while leaving the source/drain regions in the memory cells of the device unmodified and adding no critical mask steps. Methods for implementing both low dose drain and graded source/drain modifications in a double poly non-volatile memory process include the possibility of leaving the spacers used to modify the peripheral source/drain regions in place in the array portion of the device. Alternate methods include the possibility of removing the spacers in the array portion without the addition of critical mask steps and of keeping the spacers out of the array portion entirely.


Find Patent Forward Citations

Loading…