The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 1988
Filed:
Dec. 29, 1986
Applicant:
Inventor:
John W Reeds, Thousand Oaks, CA (US);
Assignee:
Hughes Aircraft Company, Los Angeles, CA (US);
Primary Examiner:
Int. Cl.
CPC ...
G01R / ;
U.S. Cl.
CPC ...
3241 / ; 3241 / ;
Abstract
An apparatus for use in testing IC chips on a semiconductor wafer is disclosed that allows the wafer and an electrical probe to be independently positioned and then clamped together and moved as a single unit when they are in alignment. This permits a chip on a wafer to be supplied with power and tested electronically while any desired area of the chip can be positioned in the field of view of a scanning electron microscope for examination, such as with a voltage-contrast secondary-electron detector. Use of the disclosed apparatus will greatly facilitate and simplify the testing of unbonded chips on semiconductor wafers.