The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 20, 1988
Filed:
Jun. 02, 1987
Applicant:
Inventors:
Toshiyuki Aida, Chofu, JP;
Hiroshi Takeuchi, Matsudo, JP;
Sumio Hosaka, Tokyo, JP;
Shigeyuki Hosoki, Hachiouji, JP;
Tadashi Ikeda, Kanagawa, JP;
Assignee:
Hitachi, Ltd., Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L / ;
U.S. Cl.
CPC ...
310328 ; 310360 ; 310361 ;
Abstract
A piezoelectric crystal without spontaneous polarization such as Li.sub.2 B.sub.4 O.sub.7 or quartz crystal is jointed to a cathode on the side opposite to the tip thereof to finely drive the cathode. The surface observation apparatus mounting the cathode makes it possible to observe the surface of a sample at high speeds.