The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 1988
Filed:
Nov. 24, 1986
Shashi D Malaviya, Fishkill, NY (US);
Gurumakonda R Srinivasan, Poughkeepsie, NY (US);
International Business Machine Corporation, Armonk, NY (US);
Abstract
A method of integrated circuit fabrication and the resulting integrated circuit wherein areas of recessed oxide isolation surround active device regions and the bird's head and bird's beak formed during formation of the recessed oxide regions is eliminated by forming a deep dielectric isolation trench directly over the bird's head. A very thin epitaxial layer can be provided over the active device regions of the integrated circuit. Preferably, the thin epitaxial layer is selectively grown only over active device regions. Also, in later manufacturing steps, metal is deposited in direct registration with contact areas.