The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Sep. 13, 1988
Filed:
Aug. 05, 1987
Applicant:
Inventors:
Mitsuo Tsuzuki, Tokyo, JP;
Michihisa Suga, Tokyo, JP;
Assignee:
NEC Corporation, , JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B44C / ; C23F / ; B29C / ; C03C / ;
U.S. Cl.
CPC ...
156644 ; 137517 ; 156652 ; 156655 ; 156656 ; 1566591 ; 1566611 ; 156668 ; 204 11 ; 3461 / ; 430323 ; 430324 ; 430379 ;
Abstract
A photoresist and etch method is used to manufacture valve elements of an ink jet printer. The method involves the building of successive layers upon a substrate, with the layers including conductive spacer layers which may be dissolved and plated layers that resist the dissolving. The resulting structure is a very small structure manufactured to extreme accuracy.